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Tankless Megasonic Cleaning System "PULSE JET" from

HONDA Electronics CO.,LTD


The principles

■The principles of ultrasonic cleaning
Ultrasonic cleaning uses ultrasound energy to remove particles from the surface of the object to be cleaned. In the illustration below, a sound wave - one wave length(λ) - is shown passing through a liquid in a cleaning tank. The highest energy occurs at the peak of the wave. It is possible to predict the location of the greatest cleaning energy given a specific frequency and knowledge of the acoustic velocity, as shown below.
(λ=1 wave length)



There are two types of elements which generate physical power to clean:
By cavitation… Low frequency.
Acceleration of the molecules of water… High frequency.

 

The leading “Tank - less”  Pulse Jet Cleaning Systems
Ultraschall Megaschall Reinigungsdüse

 400kHz - 3 MHz

By adding a high frequency signal to the flowing water, the acceleration of the water particles is dramatically increased, which in return removes easily submicron particles.
Through continuous DI-Water flow “Foreign Material” is removed and re-deposition is avoided.
High throughput allows direct integration into the production line.
The variable output power adjustment enables the cleaning of fragile parts (i.e. magnetic heads).
For smaller particles higher frequency (1.5 MHz, 3MHz) equipment is available.

 

 


WAFER / Substrate cleaning Products

 

W-357-1MQB

W-357-1MCC
W-357-1MBK
W-357-1MGH

HONDA Electronics high Frequency Cleaning Products

The selection of a frequency

The principles & The selection of a frequency

Range of frequency Frequency Object to be cleaned & Application Transducer Model
Low
frequency
28kHz
40kHz
50kHz
* Machine part (Cut part, Plate, Cast metal, Mold tool)
* Spinning nozzle, Molded resin product, Lens
* Precision machinery component, Filter
* Laboratory product, glasses, precious metal
N type WS-600-28/40
WS-1200-28/40
F type
S type
Desktop type W-170ST
WT-100M
WT-200M
WT-300M
WT-600-40
WT-1200-40
Multi
frequency
28/45/
100kHz
* Machine part (Cut part, Plate, Cast metal, Mold tool)
* Spinning nozzle, Molded resin product, Lens
* Precision machinery component, Filter, Narrow tube
* Laboratory product, glasses, precious metal
N type W-115
W-118
W-338
WD-600-28/40
WD-1200-28/40
F type
S type
Desktop type W-113
W-113MK-II
Middle
frequency
75kHz
100kHz
200kHz
* Mechanical part for hard disk
* Hard disk head
* Lens
N type W-100-HFMK II
W-200-HFMK II
F type
S type
High
frequency
400kHz
1MHz
3MHz
* Wafer
* Masking
* LCD, PDP
* Optical disk
Nozzle type W-357P type
W-357LS type
W-357HP
W-357-1MBK
W-357-1MQB
W-357-1MCC
W-357-1MGH

Immersible type transducer= N type
Vibration-plate type transducer= F type
Standard cleaning tank type transducer= S type
Standard cleaning tank type transducer with a heater= H type


Mega-/Ultrasonic “Tank - type” Cleaning Systems 

  top of the page

 
MEGASONIC Tank System

The latest RF-Generator technology offers automatic frequency tuning.

  • 1 MHz operation frequency removes even submicron particles.
  • Provides homogeneous and low noise operation.
  • In addition to cleaning of precision parts, such as magnetic heads, the W-357HP is the best choice for extremely demanding precision cleaning applications including hard disk and semiconductor devices, as well as final cleaning of semiconductor wafers.
  • Oscillation and output power can be controlled from an external controller.
Megasonic Generator Vibrator-Plate type transducer F-type

Model code

W-357HPT

Model code

W-357HPF

Frequency 1MHz Max.power input 600 W

Max. Power output

600W (adjustable)

Transducer

Piezoelectric ceramic

Overall size (mm)
 W x D x H

360 x 400 x 128

Dimensions ( mm)
W x D x H

310 x 250x 61

Output indication

LED level Indicator

Max. liquid temparature

85°C

Power supply

AC200V 1200VA

Liquid-contact material

SUS316L

Weight

4 kg

Weight

Approx. 3.5 kg


 

For more information, please contact us !

Voss electronic GmbH
Poinger Strasse 2·
D-85551 Kirchheim-Heimstetten
Phone +49 (0)89 20 111 77
Fax +49 (0)89 20 128 77

 


 


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