Our Products
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Pellicles for Photomasks |
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Pellicles and Pellicle Mounting Tools
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A pellicle is a photomask protective cover used in a projection printer, wafer stepper or scanner
to optimize the product yield. It is composed of a thin transparent membrane adhered to a metal frame which seals off a photomask or a reticle from harmful particle contamination.
As the leading pellicle supplier in the world, MLI has the capability and capacity to meet the
requirements of virtually all customers worldwide. Products include large LCD pellicles, deep UV pellicles, and g-, h-, and i-line pellicles. All frame sizes and many types of packages for different
automatic handling machines are also available.
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Film Specifications:
(All coatings are super-clean, non-sticking polymer AR coatings.) |
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material |
part no |
thickness (µm)
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double-sided
AR coating |
transmission |
wavelength (nm)
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NC |
100
102
122* |
2.85
2.85
- |
No
Yes
Yes |
91% (avg)
97% (avg)
99% (min)
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350-450
350-450
365,436 |
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CE |
201* |
- |
Yes |
99% (min) |
365,436 |
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FC |
602**
703** |
-
- |
No
No |
99% (min)
99% (min) |
248,365
193,248 |
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NC = Nitrocellulose
CE = Cellulose Ester
FC = Fluorocarbon Polymer
* MLI® U.S. Patent #5,339,197.
**MLI® U.S. Patent #5,772,817. |
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| Adhesive Table: |
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Adhesive #
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Thickness (mm)
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Carrier
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Adhesive
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Adhesion (oz.in.)
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#1
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0.10
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Polyester
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Acrylic
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56
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#2
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0.25
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Vinyl Foam
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Acrylic
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45
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#15
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0.25
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Vinyl Foam
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Acrylic
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55
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#17
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0.25
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none
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Acrylic
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64
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For more information, please
contact us !
Voss electronic GmbH
Poinger Strasse 2·
D-85551 Kirchheim-Heimstetten
Phone +49 (0)89 20 111 77
Fax +49 (0)89 20 128 77
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