Our Products
Electrodes for Plasma
Etching
Raw Material - Single Crystal
Silicon
The raw materials of
the silicon electrodes are carefully controlled according to the
supplier specifications.
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Inspection item |
Specification |
Receiving inspection |
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P-type (Boron dope) |
Purchase specifications and
Delivery specifications |
Based on the inspection results
of a Crystal Puller |
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Crystal orientation (1,0,0) |
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Purity |
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Slip |
Acid etching and visual inspection |
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Resistivity |
Four prove measurement |
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Size |
Slide calipers and Micrometer |
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Heat treatment |
According to spec. |
Electrode Plate-Machining
technology
Our machining
technology enable us to deliver superior surface finish of the
gas hole.
Other products
For TEL
®
Etchers:
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Carbon electrode;
TE-580, TE-5000 series, TE-8500, UNITY
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Silicone electrode;
TE-5000 series, TE-8500, UNITY-DP * IEM * AIEM * SCCM
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Carbon focus ring;
TE-7000 series, UNITY-DM * DRM
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Silicon focus ring;
TE-7000 series, UNITY-DM * DRM * IEM * AIEM * SCCM
Parts for Etchers:
- Edge ring, Hot edge ring
- Insert ring
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For more information, please
contact us !
Voss electronic GmbH
Poinger Strasse 2·
D-85551 Kirchheim-Heimstetten
Phone +49 (0)89 20 111 77
Fax +49 (0)89 20 128 77
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